We
supply vacuum thin film deposition services on customer-supplied
substrates by SPUTTERING
or EVAPORATION. Sputter coating is
performed in Perkin/Elmer 4410 and MRC 603 and 903 sputter machines.
Electron beam evaporations are performed in modified CHA and Varian VACUUM SYSTEMS. All systems are cryopumped and housed in a Class 100 clean room. Substrates can be up to 12 inches square depending upon the system and material combination.
We are able to offer surface acoustic wave (SAW) device fabrication on piezoelectric materials such as quartz or lithium niobate. Ultrasound is one of our specialties with over 30 years experience with SAW devices and bulk piezoelectric materials such as PZT.
Our
extensive materials and processing experience can be called upon
to decide the best solution to your thin film needs.
MATERIALS INVENTORY - Deposition materials presently in our inventory, or which we are able to produce by reactive processes, include the following:
Sputtered
films:
Ag,
Al, Al-1%Si, Al2O3, Au, Co-80%Cr, Cr, Cu, Fe, Ge, Mo, Nb, Ni, Ni-20%Cr, Ni-7%V,
Pt, Si, SiC, Si3N4, SiO2, Ta, TaN, TaSi2, Ta5Si3, Ti, TiN, TiO2, Ti-90%W,
W, WN, WSi2.
Evaporated
films:
Ag, Al, Al2O3, Au, CaF2, Cr, Cr2O3, Co, Cu, Dy, Er2O3, Ga, Ge, Hf, HfO2, In,
Ir, ITO, MgF2, MgO, Mo, Nb, Ni, Pd, Pt, Re, Ru, Si, SiO, SiO2, Sn, SnO2, Ta,
Ti, TiO2, V, Y, ZnO, Zr.
This list can be enlarged as targets or evaporation materials are purchased.